摘要
为了消除压电陶瓷的迟滞、蠕变等非线性对定位精度的影响 ,采用了非线性PID控制算法来实现微定位工作台的实时控制。利用跟踪微分器对信号进行跟踪并得到其微分信号 ,提高了控制系统的鲁棒性。通过计算机仿真 。
In order to eliminate the characteristics of hysteresis and creep of the micro-positioning table, the non-linear PID control algorithm is proposed to implement the real-time control of the micro-positioning work-piece table. Two non-linear differential trackers are used to improve the robust of the control system. Simulations verify the performance of the work-piece table and the validity of the close loop control.
出处
《天津职业技术师范学院学报》
2004年第3期1-4,共4页
Journal of Tianjin Vocational Technical Teachers'college
基金
天津市自然科学基金资助项目 (0 1 360 531 1 )
关键词
微定位工作台
弹性铰链
压电陶瓷
非线性PID
micro-positioning table
flexure hinge
piezoelectric actuator
non-linear PID control
