摘要
本文介绍了二元光学的基本概念与原理,说明了二元光学元件的设计和制作过程,并总结了近十年来二元光学的进展情况。
The basic concept and principle of binary optics are briefly reviewd in this paper, as well as the illustration of the design and manufacture processing of binary optical elements. The development of this subject in the recent 10 years is also summarized.
出处
《金陵科技学院学报》
2004年第3期22-25,29,共5页
Journal of Jinling Institute of Technology
关键词
二元光学元件
衍射效率
光刻
binary optical element
diffraction efficiency
photolithography
