摘要
介绍了一块Φ520mm大相对孔径(F/1.6)轻量化椭球面反射镜的加工与检测方法。镜面的有效口径为Φ502mm,顶点曲率半径为1600mm,非球面系数k=-0.9663,面形精度要求优于0.025λ(RMS)。镜子背面有54个大小深浅不一的不通孔,用于减轻镜子的重量。采用WYKO干涉仪检测得到镜面面形误差达RMS0.02λ,λ=632.8nm。
The method of manufacturing and testing for an ellipsoid mirror with Φ520mm diameter are discussed. The parameters of the mirror are as follows: clear aperture is Φ502mm, radius of curvature is 1600mm, conic constant k=-0.9663, requirement of surface accuracy is λ/40(RMS)at λ=632.8nm. In order to reduce the weight of the mirror, 54 blind holes with different diameter are drilled from its back surface and the depth are matched the outline of the front-surface. Finally surface accuracy 0.02λ(RMS)is demonstrated by using the WYKO phase-shifting interferometer.
出处
《光学技术》
CAS
CSCD
2004年第5期619-622,共4页
Optical Technique
关键词
大口径强光力非球面
轻量化反射镜
光学加工
光学检测
fast F-ratio aspheric mirror
light-weighted mirror
optical manufacturing
optical testing
