摘要
飞秒激光双光子微细加工技术以其特有的高精度三维微加工优势,成为微型机械加工领域新的发展方向之一。介绍了飞秒激光双光子微细加工技术的原理和应用的现状。结合目前已有的微细加工技术,对双光子微细加工技术的特点加以评述。简要报道了利用飞秒激光双光子微细加工技术的一些研究进展。探讨了飞秒激光双光子微细加工技术今后的发展方向及其存在的基本问题。
Because of the advanced advantage of true three-dimensional microfabrication using femtosecond laser, femtosecond two-photon microfabrication has become a new tool for fabricating MEMS(micro-electro-mechanical systems)devices. The principle and current application of the femtosecond two-photon microfabrication are introduced. Contrast to conventional microfabrication technology, the virtues of femtosecond two-photon microfabrication is commended. The preliminary results of femtosecond laser two-photon microfabrication in the lab are reported. The potential applications and problems of two-photon microfabrication are discussed.
出处
《光学技术》
CAS
CSCD
2004年第5期637-640,共4页
Optical Technique
基金
国家自然科学基金资助(9030613)
"863"MEMS(2003AA404050)
科学院"百人计划"项目资助
关键词
双光子激发
飞秒激光
微细加工技术
two-photon excitation
femtosecond laser
microfabrication
