摘要
介绍利用椭偏法测量单层透明薄膜折射率和厚度的方法。采用数字迭代计算方法 ,由测量得到的起偏角和检偏角可直接算出所测薄膜的折射率和厚度。经过数值试验及与标准值比对 ,由此编制的计算程序具有准确、快速、方便的特点。经实际使用 ,计算出的厚度值误差较小。
The method of measuring index of refraction and thickness of single layer transparent film by using oval polarization is introduced. With calculation method of digital iteration, the index of refraction and thickness can be calculated directly by the measured angle of starting polarization and angle of detecting polarization. Through intercomparison of value test and standard value, the computer program written by using this method features precise, fast speed and ease. In practical operation, the reeor of the calculated thickness is very small. Key words Thickness gauge Oval polarization Data processing Program design
出处
《自动化仪表》
CAS
北大核心
2003年第11期28-31,共4页
Process Automation Instrumentation
