摘要
根据菲涅耳衍射理论,采用微光学元件制作技术,通过三次套刻制作出八位相台阶的二元离轴菲涅耳透镜。这种微型光学元件同时具有色散分光和聚焦功能,用来作为分光元件时,具有较高的光谱分辨本领和衍射效率。实验测出其衍射效率大于68%。
A binary Fresnel lens with 8 phase steps can be manufactured with micro-optical element fabricating technology and three times of alignment according to Fresnel diffraction theory. This micro-optical element has both dispersive light splitting and focusing functions. When it is used as light splitting element, it has a higher spectral resolving power and diffraction efficiency. Its diffraction efficiency tested in experiments is more than 68%.
出处
《光电工程》
CAS
CSCD
北大核心
2003年第6期4-7,共4页
Opto-Electronic Engineering
基金
江苏省教育厅自然科学基金
关键词
菲涅耳透镜
衍射效率
光谱分辨力
微光学元件
Fresnel lens
Diffraction efficiency
Spectral resolution
Micro-optical element
