前驱物结晶体升华成膜法制备TiO_2薄膜及其光催化性研究

Fabrication technique by the way of precursor crystal sublimation and photocatalysis for TiO_2 film

采用'前驱物结晶体升华成膜法'工艺,使含钛前驱物结晶体草酸氧钛酸以升华的方式,均匀地在玻璃表面形成前驱物薄膜;经过热处理,制备出外观平整透明的玻璃基TiO2薄膜,其薄膜厚度为80～100 nm,粒度≤50 nm.初步研究了制备条件、薄膜性能和本工艺制备的玻璃基TiO2纳米薄膜对甲基对硫磷的光催化降解性能.

The titanium contained precursor film was fabricated smoothly on a piece of glass by its sublimating, wich is a new fabrication technique for film named 揻ilm fabrication by precursor crystal sublimation? H2[TiO(C2O4)2] was the main composition of the precursor film on a piece of glass ,which was converted slowly to titanium dioxide by calcination, and in the mean time, a TiO2 film was forming. A smooth and transparent glass substrate TiO2 film with 80 to 100 nm in thickness and smaller than 50 nm in particle size was obtained by the experiment. The fabrication condition and film properties, as well as the photocatocatalytic degradation for Parthion-methyl are discussed.