有限口径衍射微光学元件的严格矢量分析

Rigorous vector analysis of finite aperture diffractive micro-optical elements

利用二维时域有限差分方法 (FDTD)对有限口径衍射微光学元件进行严格矢量分析。讨论了算法的数值色散、计算空间吸收边界的设置和FDTD计算区稳定电磁场向观察面的传播算法 ,它们构成严格分析有限口径衍射微光学元件的有效工具。利用该工具严格分析了衍射微柱透镜衍射效率与面型量化阶次、透镜F数的关系。

We present the rigorous vector analysis of diffractive micro-optical elements which are finite in extent using a two dimensional finite-difference time-domain(FDTD)method.Minimizing the numerical dispersion in the FDTD calculation region,setting the absorbing boundary and calculating the steady state electromagnetic fields' propagation from the FDTD region to the observation plane have been discussed in detail.Using these effective analysis tools,the relationship between finite aperture micro-cylidrical lenses'diffraction efficiency and profile's quantity levels?F-number has been analyzed,respectively,and the results are also given.