用棱镜耦合法测量薄膜波导光损耗的研究

Studies on Using Prism-Coupling to Measure Loss of Thin Film Waveguide

根据多模导波在薄膜波导中传输时的光损耗理论,利用棱镜耦合法测量了光刻胶波导中的光损耗,并根据测量结果讨论了光刻胶的传输特性。

According to the theory about optical loss of different types of guided waves passing through an optical thin film waveguide,using prism-coupling method,the optical loss in a photoengraving-resist resin waveguide is measured and the transmission property is dis-cussed.