摘要
将传统直流四探针测试仪与嵌入式系统相结合,研制出数字化智能四探针测试仪。该仪器可以自动识别被测样品电阻率,并自动切换到最佳档位,操作简便工作效率高,具有一定的实用和开发价值。
A digital and intelligent four-probe meter can be designed by combining traditional four-probe meter with embedded system. This instrument could identify the resistivity of sample , and auto shift to the best measure range. It is easy to use and works efficiently. It will be of great value in application and development.
出处
《半导体技术》
CAS
CSCD
北大核心
2004年第8期47-48,52,共3页
Semiconductor Technology