摘要
采用溶胶—凝胶技术 ,以正硅酸乙酯 (TEOS)为有机醇盐前驱体 ,无水乙醇 (EtOH)为溶剂 ,在碱催化体系中通过选择合适的原料的比例 ,制得碱性的增透膜 ,然后对所得的薄膜进行表面修饰 ,制得既有增透性质又有疏水性的增透膜 ,克服了增透膜防潮性能差的缺点。采用椭偏仪、傅立叶型红外分光光度计、UV VIS NIR分光光度计和接触角测试仪对膜的折射率、厚度、红外特性、透过光谱、接触角进行表征。
Silicate sols were obtained from tetraethoxysilane (TEOS) dissolved in ethanol in base catalyzed system by sol-gel process. Both hydrophobic and anti-reflective silica films were prepared by the dip-coating technique from the sols and surface modification. As a result, the moisture-resistant ability of anti-reflective coating was highly improved. Ellipsometry, FTIR, UV-VIS-NIR spectrophotometry and contact angle instrument are used to measure the physical properties of the films.
出处
《材料科学与工程学报》
CAS
CSCD
北大核心
2004年第4期502-504,共3页
Journal of Materials Science and Engineering
基金
国家自然科学基金重点资助项目 (2 0 1 330 4 0 )
国家高新技术 863计划资助项目 (2 0 0 2AA842 0 52 )
上海市科委中法合作资助项目(0 2SL0 0 1 )
关键词
增透薄膜
溶胶-凝胶
疏水性
表面修饰
增透
sol-gel process
hydrophobic
anti-reflective
surface modification
