添加元素对TiMeXN多元膜XPS谱的影响

Alloy-Addition and XPS Spectra of TiMeXN Films

采用XPS方法研究了TiMeXN多元膜内各元素的化学状态 ,结果表明 ,添加元素改变了TiN中Ti元素特征峰的位置和形状。首先 ,使Ti、N峰强度增大 ,O峰强度减弱 ;其次 ,使Ti2p1 / 2 峰、Ti2p3 / 2 峰和N 1s的双峰现象基本消失 ,氮化物薄膜中Ti的化学状态基本趋于一致 ;再次 ,随着微量元素总含量的增高 ,Ti2p峰的多重分裂值减小 ,直至使Ti2p1 / 2 峰和Ti2p3 / 2 峰部分重迭。在多元膜中 ,微量添加元素本身以“正离子”或“负离子”的形式存在 。

The chemical states of the constituent elements in multi component films,grown by vacuum cathodic arc deposition(VCAD) on high speed steel substrate,were studied with X ray photoelectron spectroscopy (XPS).The results show that the added elements change the Ti characteristic peak position and shape of TiN in the XPS spectra as follows:1).an increase of Ti and N peak intensities coinciding with lowering of O peak,2).disappearance of double peaks of Ti2 p 1/2 ,Ti2 p 3/2 ,and N 1 s and 3). a decrease of separation between Ti2 p 1/2 ,and Ti2 p 3/2 peaks.We suggest that the added element,acting as either cations or anions,may form tiny 2 nd phases.