摘要
NEG抽除混合气体的行为不同于抽单纯气体。测试了SEAS公司的NEG组件ST70 7WP 1 2 5 0对由 80 %H2 和 2 0 %CO组成的混合气体的抽气性能 ,并和抽纯气性能进行了比较。混合气体中的NEG对H2 的抽速受CO影响 ,随H2 吸气量的增加而明显下降。混合气体中的NEG对CO的抽速不受H2 影响。
Mixed gaseous (80% H 2 and 20% CO) were pumped by activating a non evaporation getter (NEG) to see how different it behaves when used to pump a pure gas.We found that NEG significantly reduces the pumping speed of H 2 with an increase of H 2 absorption,whereas it little affects the pumping speed of CO.Our finding is of some technical interest in designing the vacuum system of the storage ring in Shanghai Synchrotron Radiation Facility (SSRF).
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2004年第3期225-229,共5页
Chinese Journal of Vacuum Science and Technology