薄膜热阻微传感器技术

Technology of thin-film thermistance microsensor

在工业生产中,人们对温度传感器超小型化的要求越来越迫切,而薄膜传感器的出现满足这一要求。薄膜温度传感器由于其优异的性能,在工业生产中越来越得到广泛应用。本文介绍了薄膜温度传感器的特点、种类、应用,着重介绍了薄膜热敏电阻传感器测温机理、膜系、影响其测温精度的主要因素及薄膜热敏电阻主要制备工艺、设备等,并探讨了薄膜热敏电阻的标定方法,最后论述了热敏电阻传感功能薄膜的国内外发展现状及其目前制备热敏电阻传感功能薄膜需要解决的关键技术问题。

Nowadays the thin-film heat sensors are developed urgently to meet the industrial requirements and have been applied to various fields. Introducing the features, sorts/types and applications of thin-film heat sensors, the paper focuses on the thermometric mechanism, film structure and main influencing factors on the thermometric accuracy of thin-film thermistance microsensors, as well as their preparations and equipment needed. The calibration technique of thin-film thermistance is discussed. The current situation and tendency of domestic and foreign development of thin-film thermistance microsensors especially the key technological problems to solve are discussed further.