摘要
本文对薄膜压力传感器的原理、结构、工艺等进行了分析,并介绍了应用离子溅镀、激光调阻等技术研制成的一种小型超低温薄膜压力传感器。这种传感器测量范围宽、精度高、抗振动和抗腐蚀性强,能在-200℃～100℃温度范围内稳定可靠的工作。
The operating principle ,structure and technique of thin film pressure sensor are analysed in this paper .A kind of minitype ultra-low temperature thin film pressure sensor based on ion beam sputtering deposition technology and laser regulating resistance technology is introduced. The sensor has the characteristics of wide measuring range, high accuracy, anti-vibration and anti-shock. It also can stably and reliably work at the temperature bound of -200℃～ 100℃.
出处
《传感器世界》
2004年第9期21-23,共3页
Sensor World
关键词
离子溅镀
薄膜
激光调阻
温度特性
ion beam sputtering deposition
film
laser regulating resistance
temperature characteristic
