摘要
讨论了扫描质子微探针(SPM)安装调试的方法,通过象差调整,提高了SPM系统的空间分辨率。该系统可提供空间分辨率为2-3μm、束流强度为100pA的3MeV H^+束和2MeV He^+束。
In the paper a method to install and adjust the scanning proton microprobe at SINR was described. The resolution of the SPM was improved and reached 2-3μm for 3MeV H+ and 2MeV He+ beams at a current intensity of 100pA by the aberration control.
出处
《核技术》
CAS
CSCD
北大核心
1993年第9期526-530,共5页
Nuclear Techniques
