晶体生长设备的真空系统设计

Vacuum System Design of Crystal Growing Equipment

阐述了降低真空系统漏气率的一些措施,包括真空系统设计中的结构设计、密封形式的选择、密封材质的选用等,提出了一种新型的静密封结构,提高了真空系统的密封性能。

This paper discusses some measures to reduce the leakage in vacuum system, including the structural design in vacuum system design, choosing of seal form, the adoption of seal material etc, and has property a novel motionless seal structure to improve the seal property in vacuum system.