稀土氧化物抛光粉粒度的测定

THE DETERMINATION OF PATICAL SIZE OF RARE EARTH OXIDE POLISHING POWDER

本文推荐了用X射线衍射线宽法和小角散射法测定稀土氧化物抛光粉的粒度,说明了两法的原理和实验过程。粒度或晶粒大小是说明抛光粉性能的重要指标。本工作用新的进口抛光粉和国产(由不同实验室提供)CeO_2样品进行了晶粒大小和粒度的测定。就不同来源抛光粉的测定结果作了比较。实验结果用电镜相片对照,说明基本可靠。对于线宽法(测定晶粒大小)和小角散射法(测定粒度)的结果,也作了比较和说明。本文在我国首次建立了抛光粉的平均粒度大小测定方法,可用于生产控制,工艺条件选择及抛光过程研究中,因此有一定的推广价值。

The X-ray diffraction line width method(LW)and X-ray small angle scattering method (SAXS)were suggested in this paper for determinning the crystal size and partical size of rare earth oxide polishing powder.It is no doubt that one of the most important quality index of the polishing powder is the partical size. In this work, different source of polishing powder from various laboratory had been sampled for the determination, The theory and process of both methods were introduced. The results of determination for these powder were compared, It is proved that The results were raliable because they were finally checked with those observed in the TEM photograph.This is the first time in our country to suggest these methods for determination of the size of polishing powder, so it is worthwhile to recommand in the process of polishing powder producting and researching.