摘要
本文对容栅传感器误差因素进行全面分析,从设计,工艺和材料三方面提出修正方法,并在容栅式数显卡尺上应用,取得较好效果。
The error factors of capacitive gate transducer are analyzed all-sidely in this paper. The methods of error correction are proposed in three ways-design, technology and material. These achievements are applied to capacitive gate digital calliper and good results are obtained.
出处
《合肥工业大学学报（自然科学版）》
CAS
CSCD
1993年第4期40-46,共7页
Journal of Hefei University of Technology：Natural Science
基金
国家自然科学基金项目和机电部"七.五"攻关项目
关键词
容栅传感器
误差分析
误差修正
capacitive gate transducer
error analysis
error correction
