GaAs中碳的补偿率对红外吸收方法测定其浓度的影响

The Effect of the Carbon Compensation Rate in GaAs on the Determination of Carbon Concentration by the LVM Infrared Absorption

通过直接测量GaAs中碳(C)的局域振动模(LVM)红外吸收带随其荷电态的变化,研究了GaAs中碳的LVM红外吸收与其荷电态的关系。结果表明,该吸收带对C的荷电态是不敏感的,红外吸收测定GaAs中碳浓度的方法对不同C补偿率的样品都是适用的。

The relationship between the LVM infrared absorption of carbon in GaAs and the charge state of carbon has been studied by the direct measurement of the change of the LVM absorption of carbon in GaAs varying with its change in charge state of carbon. The results indicate that this in-frared absorption is not sensitive to the charge state of carbon, the method to determine carbon concentration in GaAs by the LVM infrared absorption is available to sample of various compensation rate of carbon.