α-Si_(1-x)C_x∶H薄膜材料的弹性反冲探测分析

Elastic Recoil Detection Analysis of α-Si_(1-x)C_x∶H Thin Films

介绍在中国原子能科学研究院HI 13串列加速器上,对α Si1-xCx∶H薄膜样品进行弹性反冲探测分析的方法和结果.用该加速器提供的高品质127I束流轰击α Si1-xCx∶H薄膜材料样品,用ΔE(gas) E(PSD)望远镜探测器,在前角区(30°角)测量从该样品中反冲的各元素的能谱.然后用离子束分析(IBA)程序SIMNRA对能谱进行拟合,得到样品中H,C和Si的比分及深度分布.

Elastic recoil detection analysis of α-Si_(1-x)C_(x)∶H foils has been performed at the HI-13 tandem accelerator of CIAE. High quality^(127)I beam bombards the target of α -Si_(1-x)C_(x)∶H_( ) thin film. A ΔE(gas)-(E(PSD)) telescope was used to measure the energy spectra of all elements recoiled from the samples at the angle of 30° in laboratory system. Components of H, C and Si and the profiles were obtained by simulation of the energy spectra using the program SIMNRA calculation.