用微光学技术制作位相型聚焦光栅

Phase-type Focusing Grating Prepared by Micro-optics Technique

根据菲涅耳衍射理论,采用微光学制作技术通过3次套刻,将8位相台阶的菲涅耳波带片和平面光栅组合制作在同一块基片上,构成同时具有色散分光和聚焦光谱线功能的位相型光栅。这种光栅具有较高的光谱分辨本领和衍射效率,而且光路简单,调节方便。实验测出的衍射效率大于71%。

By using three-time lithography,a combination structure of Fresnel zone plate and plane gratings with 8 phase level steps can be prepared on a quartz substrate by micro-optical element fabrication technology according to Fresnel diffraction theory.This micro-optical element has both functions of focusing and splitting light by dispersing.It has several advantages such as high diffraction efficiency, simple optical setup and convenient operation. Experimental measurement shows that the diffraction efficiency is over 71%.