结构选择优化及过正量膜厚控制在激光析光膜中的应用

Application of Selective-Optimizing Design and Variable Overshoot in Laser Beam-Splitter

分析了膜系设计中的膜层结构选择性优化方法,阐述了用光电极值法控制非4/l膜系的膜厚的方法——计算出沉积每一层具有极值的波长,然后根据此波长,给出一定的过正量进行膜厚模拟,最后确定每一层的监控波长。利用这种方法可以提高膜系厚度的控制精度。该文介绍了自主开发膜系设计软件的部分功能,并利用该软件设计并镀制出1060nm的激光析光膜。

This paper introduces the method of selective-optimizing design for some coatings, expatiates how to use the turning-point to control the thickness of non-4/l layers, also presents the way to improve the accuracy of optical monitoring, describing some functions of our software. Using the software, we have successfully designed and manufactured 1060nm laser beam-splitting coatings.