摘要
由于涉及大量的决策变量、约束和目标函数,半导体制造中的产能规划问题异常复杂。本文首先提出一个半导体制造产能规划系统的框架,然后阐述用于解决该问题的各种方法。重点介绍了数学规划(尤其是线性规划)这一最有效的工具,包括线性规划的各种建模技术及其求解算法。本文还描述了半导体制造产能规划系统的一些评价方法,在比较各种产能规划方法的基础上得出结论并对该领域未来的研究方向提出建议。
Capacity planning in semiconductor manufacturing is very complex due tonumerous variables/constraints and competing objectives. This paper describes key methodolo-gies employed to solve the difficult problems, and we focus on the most convincing approach,mathematical programming, especially Linear Programming (LP). We introduce LP modeling andalgorithm developing techniques, and also address the evaluation system of capacity planning.
出处
《半导体技术》
CAS
CSCD
北大核心
2004年第9期39-44,共6页
Semiconductor Technology
关键词
半导体制造
产能规划
数学规划
线性规划
capacity planning
semiconductor manufacturing
linear programming
