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功能梯度薄膜的脉冲激光沉积研究进展 被引量：1

Progress of pulsed-laser deposition of function gradient thin film
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摘要 介绍了功能梯度薄膜材料的特点和应用 ;比较了功能梯度薄膜常用制备方法 ;概括了功能梯度薄膜制备中的掺杂技术并给出了脉冲激光沉积功能梯度薄膜的模型 ; The characteristic and the application of function gradient thin film is introduced,comparing to the every method of preparing the function gradient thin film,generalizing the doping technology of preparing the function gradient thin film and presenting the model of pulsed laser deposition film.The application and the latest progress of pulsed laser deposition the function gradient thin film is discussed.
作者 何建平 江超 胡少六 王又青
机构地区 华中科技大学激光技术国家重点实验室
出处 《激光杂志》 CAS CSCD 北大核心 2004年第5期10-13,共4页 Laser Journal
关键词 功能梯度 脉冲激光沉积 薄膜制备 薄膜材料 制备方法 function gradient thin film doping technology pulsed laser deposition
分类号 TN304 [电子电信—物理电子学] O343 [理学—固体力学]
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参考文献9

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同被引文献14

  • 1葛春桥,薛亦渝,胡小锋,郭爱云.溶胶-凝胶方法制备AZO薄膜及其光电性能研究[J].真空电子技术,2005,18(1):20-21. 被引量：4
  • 2葛春桥.掺杂浓度对AZO薄膜结构和光电性能的影响[J].压电与声光,2005,27(6):676-678. 被引量：7
  • 3徐自强,邓宏,谢娟,李燕.掺Al对ZnO薄膜发光性能的调控作用[J].光电子．激光,2006,17(3):257-260. 被引量：17
  • 4李星,李红浪.单亲家庭隔代教育的心理学思考[J].南昌大学学报（人文社会科学版）,2006,37(6):63-66. 被引量：13
  • 5XU Z.Q.,DENG H.,LI Y.,et al.Characteristics of Al-doped c-axis Orientation ZnO Thin Films Prepared by the Sol-Gel Method[J].Materials Research Bulletin,2006,41:354-358.
  • 6Kim,H.,A.Pique,J.S.Horwitz,et al.Effect of Aluminum Doping on Zinc Oxide Thin Films Grown by Pulsed Laser Deposition for Organic Light-Emitting Devices[J].Thin Solid Films,2000,(377-378):798-802.
  • 7Martin,A.,J.P.Espinos,A.Justo,et al.Preparation of Transparent and Conductive Al-Doped ZnO Thin Films by ECR Plasma Enhanced CVD[J].Surface and Coatings Technology,2002,(151-152):289-293.
  • 8Young-Sung Kim,Weon-Pil Tai.Electrical and Optical Properties of Al-Doped ZnO Thin Films by Sol-Gel Process[J].Applied Surface Science,2007,253:4911-4916.
  • 9Martinez,M.A.,J.Herrero,M.T.Gutierrez.Deposition of Transparent and Conductive Al-Doped ZnO Thin Films for Photovoltaic Solar Cells[J].Solar Energy Materials and Solar Cells,1997,45:75-86.
  • 10ZHU Dong-mei,LI Kun,LUO Fa,et al.Preparation and Infrared Emissivity of ZnO:Al (AZO) Thin Films[J].Applied Surface Science,2009,255:6145-6148.

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激光杂志
2004年 第5期

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