微机械陀螺仪温度特性及补偿算法研究

Research on thermal characteristic and compensation algorithm for MEMS-gyroscope

微机械陀螺是近代发展起来的一种角速率传感器,与传统陀螺仪相比,它具有体积小、重量轻、价格便宜等特点,但其性能受环境温度的改变影响很大。通过分析温度变化对微机械陀螺仪的影响,推导出陀螺输出、驱动轴相位与温度的关系,提出了一种无温度传感器的新型补偿算法,经温度实验补偿后的陀螺温度漂移减小到补偿前的5%,为微机械陀螺的性能改善提供了一种新的途径。

MEMS-gyroscope is a kind of angular-rate-sensor developed in recent years, which has smaller size,lighter weight and lower cost than traditional rate-sensor. But temperature changing largely influences the performance of MEMS-gyroscope.The influence by temperature changing is analyzed.Relation among zero-rate-output,phase of drive-axis and temperature is derived.Therefore,a novel compensation algorithm without temperature-sensor is presented.The thermal bias drift of the gyroscope compensated by temperature-experiment is reduced to 5% of the value before compensation.The results show a new method to improve the performance of MEMS-gyroscope.