微电机粗糙表面粘附仿真分析

Rough surface sticking simulation analysis of micro-motor

针对粘附现象严重影响微电机性能的问题,建立了微电机粗糙表面"截球型"粘附物理模型;根据Hamaker微观连续介质修正理论,推导出微电机粘附力数学模型,仿真出相当表面光洁度等级分别为10级、11级和12级的微电机粘附力数值结果,从而为微电机的结构设计提供了理论依据。

'Sticking' affects the micro-motor performance and reliability greatly.The micro-motor rough surface 'truncate sphere type' sticking model is set up.On the basis of the Hamaker micro continuum medium revision theory,the sticking force mathematical model is derived, and followed by the simulation results with the fineness degrees of No.10, No.11 and No.12 class,thus the theoretical basis is provided for the structural design of the micro-motor.