声表面波加速度计中压膜阻尼技术的研究

Research on squeeze-film damping applied in SAW accelerometer

分析论证了压膜阻尼应用于声表面波加速度计的可行性。利用机电模拟方法,建立完整的声表面波加速度计等效电路模型。通过对该模型进行计算机仿真分析,总结出各种压膜阻尼参数影响声表面波加速度计性能的规律,从而为声表面波加速度计的设计提供重要的理论依据。

Feasibility of applying the squeeze-film damping to SAW accelerometers is demonstrated.By using the mechanics to electronics method,the complete equivalent circuit model of the SAW accelerometer is presented and simulated.The law which squeeze-film damping affects the performance of SAW accelerometer is deduced,which is important to the design of SAW accelerometers.