一种平板式MEMSRF射频开关的设计

Design on slab mode MEMS RF switch

介绍了一种实用的平板电容式MEMSRF射频开关。研究了外加驱动电压与由此所引起的极板间距和极板受力变化之间的非线性关系,提出了一种有效的基于有限元的设计分析方法,在此基础上设计了相应的MEMS加工工艺流程,并给出了具体的MEMS工艺。

A kind of slab mode capacitive MEMS RF switch is proposed. The nonlinear relationship between the drive voltage and the variety of the stress is researehed,an effective method based on FEA (finite element analysis) is proposed.The processing steps are designed,and MEMS technology is given.