用于红外地平仪的双列硅集成热堆传感器

The Silicon Thermopile Detector for Infrared Holizon Sensors

本文报道了试用于红外地平仪的新型热堆传感器。由于尺寸小、集成热偶对数高,故设计成双列硅集成结构,集成B-Sb热偶对为112对。采用集成电路工艺和微细加工技术研制,使器件获得较好的稳定性和可靠性。测得器件性能为:电阻10±1kΩ,响应率0.9～1.2V/W,时间常数<100ms.探测率D~*≈1×10~8cmHz^(1/2)/W。

This paper described a novel thermopile detector for infrared horizon sensors. A double-row Si thennop le composing of 112 Bi-Sb thermal couples has been developed by using integrated circuit process and micromachining technology. Experimental results showed its high sensitivity and stability. The resistance of the thermopile was 10±1kΩ, responsivity 0.9～1.2 V/W and time constant <100 ms.