硅—铝网栅亚毫米波F—P干涉仪及其在激光频谱研究中的应用

Si-Al GRID SUBMILLIMETER WAVE F-P INTERFEROMETER AND ITS APPLICATION TO LASER SPECTRUM OBSERVATION

在单晶硅薄片上用光刻方法制作了铝金属网栅,并用在亚毫米波F-P干涉仪上。适宜用作亚毫米波波长的测量和频谱特性的研究。

Silicon chip-based aluminium metallic grids with desired characteristics were made and used in the submillimeter wave F-P interferometer. This FPI is suitable for wavelength measurement and laser spectrum observation, especially for short submillimeter wave range.