基于相关检测的平面镜摆动姿态在线测量仪

Online Measuring Instrument for Mirror Pendulum Pose Based on Correlation Measurement

介绍一种用于在线测量平面镜摆动姿态的方法及装置。装置采用四象限硅光电探测器为检测元件测量平面镜的摆动姿态,测量原理简单;测量装置以交流调制电路驱动半导体激光器的输出,采用偏振分光的光学系统,并利用相关检测的信号处理方式,有效消除了直流信号漂移的影响,具有较高的测量稳定性;分析了光斑形状及大小对测试结果的影响,研制了专门的标定装置;角度测量范围±30',测量精度优于0.5";测量传输器小巧、简单,可以很方便地应用于科学实验和工业测量中,实现平面镜摆动姿态的在线测量。

This paper introduces an online measuring instrument for mirror pendulum pose, which uses quadrant Si-photoelectric cell as the detector. The semiconductor laser is driven by AC modulate circuit and the polarization splitting optical system and the correlation signal process is adopted, so the DC drift effects can be removed and the instrument's reliability and precision are improved. The result being effected by beam spot size is analyzed in this paper, and a special demarcate equipment is designed. The measurement range is about ±30′, the precision is better than 0.5″. The instrument can measure the mirror pendulum pose online easily in science study and industrial measurement.