被测物离焦状态对共焦显微系统横向分辨特性的影响

Effect of Object Defocused State on Lateral Resolution Property of Confocal Microscopy System

分析了被测物离焦状态对共焦显微系统(CMS)分辨特性的作用机理,指出了离焦状态是影响CMS横向分辨特性下降的主要影响因素,进而提出采用基于环形光瞳滤波技术的二元光学整形环形技术,来改善其离焦状态下的横向分辨特性。理论分析和实验验证表明:环形光瞳滤波技术的采用,显著抑制了CMS由于被测物离焦状态引起的艾里斑旁瓣的增长,克服了CMS因离焦状态而引起的横向分辨特性下降的缺点。

The effect of object-defocused slate on the resolution property of confocal microscopy system (CMS) was analyzed and the defocused state was considered as the main factor of influence on the lateral resolution property of CMS. In order to diminish its effect, shaping annular beam technique using binary optics based on annular pupil filter technique was proposed to improve the lateral resolution property of CMS under the defocused state. Experiments and analysis indicate that annular pupil filter technique used suppresses obviously the increasing of side lobe of Airy spot and the decreasing of CMS lateral resolution caused by the defocused state of CMS, and reaches the superresolution in the lateral direction.