化学蚀刻在光纤光栅低频微振加速度传感器中的应用

Application of chemistry etch in low frequency accelerometerbased on fiber grating

介绍了一种自行研究应用双光纤光栅作为传感元件的加速度传感器制作方案,在理论上论证了使用双光纤光栅对加速度的测量具有不受温度影响和增加灵敏度的优点。同时,分析了化学蚀刻在Si晶体上制作光纤光栅加速度传感器的具体工作过程,以及残余应力对传感器的影响。

A facture scheme of accelerometers in which double fiber grating used as sensors is introduced. The double fiber grating used in the acceleration measure has the excellence of temperature immunity and high sensitivity is demonstrated in the paper, and the facture process of fiber grating accelerometers by chemistry etch on the Si crystal and the influence of remnant stress on the sensor is analysed.