摘要
SnCl_4·5H_2O和NH_4F的水溶液经超声雾化后喷涂到高温(400～500℃)的普通玻璃上热解形成掺氟二氧化锡(SnO_2∶F)透明导电多晶薄膜.由扫描电镜、X射线衍射、电导率和紫外可见光谱实验研究,得出了膜的喷涂条件、微观结构和膜的电学光学性能之间的定性对应关系.
The droplets of SnCl_4·5H_2O and NH_4F solution produced by ultrasonic viberation are
spray-deposited on hot glass substrate to form transperant and conducting fluoride doped tin dioxide(SnO_2:F)thin films.Through the experimental studies of SEM,x-ray
diffraction,conductivity and spectral transmittance,some qualitative relations among the deposition parameters,microstructure,elec-trical and optical properties of SnO_2:F films are revealed.
出处
《湖南师范大学自然科学学报》
CAS
1993年第1期46-50,共5页
Journal of Natural Science of Hunan Normal University
基金
湖南省教委资助课题
关键词
超声雾化喷涂
透明导电膜
氧化锡
ultrasonically spray-deposition
flouride doped tin dioxide
transparent conducting films
polycrystalline
