摘要
采用248nm KrF准分子激光照射电化学刻蚀中的金属阳极,记录过程中阳极电流的变化,对不同金属的阳极电流 曲线进行对比分析,发现在激光作用的时间内,阳极电流显著增大,激光作用过后,阳极电流迅速减小,而且脉冲频率越高阳 极电流增加的幅度越大,不同的金属阳极电流曲线有所不同,这反映准分子激光对不同金属电化学特性的增强有所差别。
In this paper, the experiments of 248nm KrF excimer laser-enhanced electrochemical processes of metals are carried out The anode current curves are recorded and analysised. They show that the currents increase obviously during the laser running and decrease quickly without the laser. And the frequency of laser pulses is quicker, the magnitude of currents increase is bigger. The differences in the curves are also studied, they indicate that the electrochemical characteristics of different metals in excimer laser- enhanced processes are different.
出处
《应用激光》
CSCD
北大核心
2004年第4期201-202,200,共3页
Applied Laser
基金
本文受国家高技术研究发展计划(863计划编号2002AA421190)资助
