摘要
薄膜晶体管(TFT)是众多场效应晶体管(FET)中的一种。PC机及监视器等高清晰度液晶显示(LCD)中的TFT以有源矩阵的形式应用在点阵驱动的有源矩阵液晶显示器(AMLCD)中。作为开关器件,AMLCD中的TFT工作在饱和模式,其源极总是连接数据总线(视频),漏极接像素电极。其结构为交错/反交错和共面/反共面两种基本类型。TFT的主要工艺与IC技术兼容,半导体层所用的材料主要是a-Si。
Thin film transistor(TFT)is one type of field effect transistors(FET). TFT's in high definition displays, such as personal computers and LCD monitors,are used in the dot-matrix driven active matrix liquid crystal display(AMLCD). As a switching device, TFT in AMLCD operates in saturation mode. Its source contact is always connected to the data bus(video), and the drain to the pixel electrode. There are two basic structures of TFT: staggered/inverted-staggered and coplanar/inverted-coplanar.The main process for TFT′s is compatible with IC processing technology.And its semiconductor layer is amorphous silicon.
出处
《微电子学》
CAS
CSCD
北大核心
2004年第5期554-557,共4页
Microelectronics
基金
陕西省教育厅资助项目(03JK161)