摘要
微悬臂梁结构传感器以其低成本、小体积、高性能在当今传感器研究中愈来愈受到重视。文章概述了以微悬臂梁为主要结构的传感器在化学及生物探测中的应用进展,介绍了几种可能用于化学和生物探测的高性能微悬臂梁传感器。
The microcantilever sensor, due to its low-cost, small size and high performance, attracts more and more attention in the research and development of sensors in recent years. The development of chemical sensors and biosensors based on the microcantilever structure is reviewed in the paper. Also, several high-performance microcantilever sensors are described, which might have potential applications in chemical and biological sensing.
出处
《微电子学》
CAS
CSCD
北大核心
2004年第5期493-496,共4页
Microelectronics
基金
国家自然科学基金资助项目(30170266)
