摘要
本文用电子探针对硒化镉薄膜进行微区分析,对薄膜的成分和厚度进行同时测定,并分析了制备条件对薄膜参数的影响。
A Microanalysis of CdSe thin films was conducted with clectron prode.The con- stituent and thickness of the films were determined simultaneously.The influence of deposi- ting conditions on film parameters was analysed as well.
出处
《华侨大学学报（自然科学版）》
CAS
1993年第2期175-179,共5页
Journal of Huaqiao University(Natural Science)
基金
福建省自然科学基金资助课题
关键词
半导体
薄膜
微区分析
硒化镉
cadmium selenide
semiconductor film
microanalysis
