化学气相淀积TiO_2超细颗粒过程的动力学研究

KINETIONS STUDY OF CVD OF TIO_2 ULTRAFINE PARTICLE

本文在常压热CVD反应器内,以TiCl_4+O_2反应体系制备TiO_2超细颗粒,研究了过程的动力学.结果表明,在550～950℃的范围内,得到CVD合成TiO_2超细颗粒过程的表观活化能为62.4kJ/mol.其反应速率对TiCl_4是一级的,在O_2浓度不太高时,反应速率与O_2浓度成0.44级关系;当O_2浓度较高时,反应速率与O_2浓度无关.

Ultrafine TiO_2 particles were prepared with TiCl_4+O_2 in aaerosol reactor. The effects of reaction parameters on particle production rate were investigated. Experimental results indicate that the apparent activation energy for the reaction was 62.4 kJ/mol. The reaction was first order with respect to TiCl_4 and one half order with respect to O_2 up to P_(O_2)=0.64 atm. At higher O_2 concentration, the reaction become zero order with respect to oxygen.