摘要
文中讨论了硒化锌基底上的高效高稳定性红外减反射膜的设计与制备。介绍了离子束辅助沉积该膜系的过程,给出了用该方法制备的8μm-12μm波段宽带减反射膜的实测光谱曲线,其峰值透过率高达99％以上,在设计波段范围内平均透过率大于98％,膜层附着性能好,光机性能稳定。
The design and deposition of infrared wide-band antireflection film on ZnSe substrate by ion beam assisted deposition are discussed. The measured spectral curve of 8μm - 12μm antireflection film deposited by this method is given. The experimental result has shown that its peak transmission is more than 99% and the average transmission in the designed wavelength range is greater than 98%. In addition, it has good adherency and high stability in optical and mechanical properties.
出处
《红外》
CAS
2004年第10期1-3,9,共4页
Infrared
