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氟化类金刚石薄膜的研究进展 被引量：1

Development of Fluorinated Diamond-like Carbon Film
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摘要 氟化类金刚石 (FDLC)薄膜是在传统类金刚石膜基础上发展起来的一种新型表面改性材料。本文简述了FDLC薄膜的结构、性能 ,重点介绍了其制备工艺 ,讨论了源气体的种类和退火工艺对薄膜的影响。 The newly developed fluorinated diamond-like carbon (FDLC) films is playing an increasingly important role in surface modification.The latest progress of the new surface modification material was reviewed with discussion focusing on its structure,its properties and its growth techniques.Influence of different gaseous sources and annealing temperatures on FDLC film growth was discussed also.
作者 张茹芝 刘贵昌 邓新绿
机构地区 大连理工大学化工学院 大连理工大学三束材料改性国家重点联合实验室
出处 《真空科学与技术学报》 EI CAS CSCD 北大核心 2004年第4期271-275,共5页 Chinese Journal of Vacuum Science and Technology
基金 国家自然科学基金资助项目 (No .2 98760 0 3 )
关键词 氟化类金刚石薄膜 类金刚石膜 表面改性材料 气体 性能 制备工艺 FDLC,DLC,Development,Deposition,Property
分类号 TB332 [一般工业技术—材料科学与工程] O484.41 [理学—固体物理]
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参考文献25

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共引文献1

同被引文献21

  • 1卢文壮,左敦稳,王珉,黎向锋,徐锋,褚向前.大面积B掺杂CVD金刚石膜的制备研究[J].人工晶体学报,2004,33(5):726-730. 被引量：21
  • 2王进,Sunny C.H.Kwok,陈俊英,杨萍,黄楠,P.K.Chu.磷掺杂类金刚石薄膜的制备与性能研究[J].真空科学与技术学报,2005,25(2):123-126. 被引量：5
  • 3赵栋才,任妮.降低超硬类金刚石薄膜应力的方法[J].真空与低温,2006,12(1):1-8. 被引量：21
  • 4肖剑荣,徐慧,邓超生,王焕友,李燕峰.含氮氟化类金刚石(FN-DLC)薄膜的研究:(Ⅲ)疏水性能分析[J].物理学报,2007,56(5):2998-3003. 被引量：4
  • 5Sharif Mohammad Mominuzzaman, Tetsuo Soga, Takashi Jimbo et al.. Diamond-like carbon by pulsed laser deposition from a camphoric carbon target: effect of phosphorus incorporation [J]. Diamond and Related Materials, 2001, 10:1839- 1842.
  • 6G. M. Fuge, P.W. May, K.N. Rosser et al.. Laser Raman and X-ray photoelectron spectroscopy of phosphorus containing diamond-like carbon films grown by pulsed laser ablation methods [J]. Diamond and Related Materials, 2004, 13:1442- 1448.
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  • 8Chen Yuqiang, Peng Hongyan, Zhao Lixin et al.. Influence of nitrogen gas on structure and properties of DLC films prepared by XeC1 pulsed laser deposition[J]. Trans. Nonferrous Met. SOC,(China) 2006, 16:s306-s309.
  • 9B. Kleinsorge, A. C. Ferrari, J. Robertson et al.. Influence of nitrogen and temperature on the deposition of tetrahedrally bonded amorphous carbon[J]. J. Appl. Phy., 2000, 88(2): 1149-1157.
  • 10S. S. Camargo Jr., J. P~ Gomes, J. M. Carrapichano et al.. Silicon-incorporated diamond-like coatings for Si3N4 mechanical seals[J]. Thin Solid Films, 2005, 482:221-225.

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真空科学与技术学报
2004年 第4期

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