工艺工作中存在的若干错误观点及我的基本认识

Several Mistaken Options on Process Research and My Primitive Understanding

列举了电子互连工艺研究中的若干错误观点,提出了个人对工艺工作的基本认识,希望有助于树立正确的工艺研究观,促进我国电子互连工艺技术向更高、更强的方向发展。

This paper lists several mistaken options existed in the process research of electronic interconnection and brings forward my personal primitive understanding on process working, in the hope that it will help to establish a correct view on process research and promote our country's electronic interconnection technologies toward a higher and stronger state.