摘要
介绍纳米科技几个主要方面的最新研究进展 :纳米级精度的测量 ;扫描隧道显微镜和原子力显微镜 ;超精密加工和原子级加工 ;纳米材料 ;微型机械和微型机电系统 ;
The new developments of nano-science and nano-technology, including nano-metrology, STM, AFM and their new applications, nano-particles materials and nano-structure materials, micro-machining with SPM, micro-machines and MEMS, micro-robots, micro aerial vehicle, MIMU, micro satellite, technology manufacturing of micro-machines and MEMS, micro machining and LIGA technology is introduced.
出处
《工具技术》
北大核心
2004年第9期3-12,26,共11页
Tool Engineering
