光栅的衍射在高分辨力测长仪器中的应用研究

The Application and Research of the Diffraction Grating in Measuring Instruments in Length of High Resolving Power

选用高密度光栅产生衍射条纹 ,研究其信号合成、采集及处理的方法以实现在长度计量中 ,纳米分辨力的计数。

The method using the diffractive stripe brought by the high consistency of grating and researching the compound, gather and disposal of its signal to achieve the calculation of the resolving power of nanometer in the measurement of length.