摘要
应用检相原理可以提取有限长度调制信号的初相、相位差和相位调制量。通过提高A/D转换器的采集位数,提高检相分辨率.它与检测对象的运动速度无关,这为检相展示了新的途径。
According to the phase-detecting principle, the initial phase, phase difference and phase-modulation rate may be obtained in a limited length of modulator singnal. Phase-detecting resolution can be improved by changing digits of A/D converter and independent of the speed of detected object. This opens a new way to improving phase-detecting resolution for grating measurement.
关键词
初相位
相位差
调制信号
检相
Initial phase
Phase difference
Modulator signal
Phase-detecting
