一种高精度原子力显微镜的设计及应用

Design and Application of a High-resolution AFM

简述了重庆大学研制的原子力显微镜 (AFM )样机的工作原理和应用 ,重点介绍了其镜体的独特设计。该样机采用扫描隧道显微镜检测微悬臂的起伏 ,通过四维机械驱动和双压电陶瓷扫描 ,有效提高了扫描精度 ,扩大了扫描范围 ,简单适用的微悬臂使操作大大简化。给出了用该机检测到的具有代表性的

An AFM model has been developed by Chongqing University. The principles of operation and some applications were reported briefly. The special design of the lens body was introduced in detail. This model used a STM to detect the shift of the micro-cantilever. Four motors and two PZT tubes were used to enlarge the scanning range and to enhance the resolution. A simple cantilever was used to make it easier to prepare for the scanning. Four typical images obtained with the model are given as samples.