用掩蔽注入法研究钛注入H13钢的耐磨性

Wear resistance of Ti-implanted H13 steel using covering implantation technology

采用由金属蒸汽真空弧离子源引出的强束流钛、碳离子对H13钢进行表面改性研究 .钛和碳离子注入剂量分别为 3× 10 1 7和 1× 10 1 7cm- 2 ,引出电压分别为 4 8和 30kV ,平均束流密度分别为 4 7和 2 0 μA·cm- 2 .为了保持相同的摩擦磨损实验条件 ,注入过程中采用掩蔽注入技术 .摩擦磨损实验结果表明 ,钛离子注入H13钢提高了其耐磨性 ,并大幅度降低其摩擦系数 .利用卢瑟福背散射谱测量了离子注入表面的成分 ,并采用逐层递推法得出了钛在H13钢中的浓度深度分布 。

Ti and C ions extracted from a metal vapor vacuum arc ion source were implanted into H13 steel, with an implantation dose of 3×10 17cm -2, an extraction acceleration 48kV,and an average ion beam flux between 20 and 47μAcm -2.Rutherford backscattering (RBS) spectrum was used to measure the Ti concentration depth profile in H13 steel after Ti ion implantation. The surface microstructure observation was carried out using glancing x-ray diffraction analysis(GXRD). Wear test results showed that the wear rate of the implanted layer dropped by about 40% for Ti,C dual implantation. In addition, the Ti implantation was found to significantly reduce the friction coefficient of steel H13. The wear mechanisms of the implanted layer were discussed by results of RBS and GXRD.