提高硅光探测器量子效率技术与应用

The technique for enhancing quantum efficiency of Si photodetector and its application

本文介绍了提高硅光探测器量子效率的半球形点阵技术。介绍了运用这一技术制作的P-I-N和RAPD硅光探测器。

In this paper, the hemispherical grating technique, which is effectively used in enhancing quantum efficiency of Si photodetector, is introduced. By using this technique, PIN and RAPD photodetector are fabricated.