摘要
本文简述光学表面微粗糙度光散射的基本特性。光散射源测量的基本原理,研制的微分散射分布测量系统与两个实验结果。
The characteristic of microroughness surface scattering and the principle of the microroughness measurement based on scattering detection are briefly reviewed. The system of measuring whole-space angular distribution of scattering based on the given theory is clearly described. Two experiments and their results are presented.
出处
《激光与红外》
CAS
CSCD
北大核心
1993年第3期49-51,共3页
Laser & Infrared
基金
国家青年基金
关键词
光散射
散射角
表面光洁度
测量
scattering study, microroughness, measuring system of scattering angular distribution